Realization of Si~1~-~x~-~yGe~xC~y/Si heterostructures by pulsed-laser-induced epitaxy of C^+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) [2403-35]: Fid-Bau Portal

Realization of Si~1~-~x~-~yGe~xC~y/Si heterostructures by pulsed-laser-induced epitaxy of C^+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) [2403-35]

Boulmer, J. / Desmur-Larre, A. / Guedj, C. / Debarre, D. / SPIE

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Realization of Si~1~-~x~-~yGe~xC~y/Si heterostructures by pulsed-laser-induced epitaxy of C^+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) [2403-35]

Boulmer, J. / Desmur-Larre, A. / Guedj, C. / Debarre, D. / SPIE

Realization of Si~1~-~x~-~yGe~xC~y/Si heterostructures by pulsed-laser-induced epitaxy of C^+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) [2403-35]

Boulmer, J. / Desmur-Larre, A. / Guedj, C. / Debarre, D. / SPIE

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Title:

Realization of Si~1~-~x~-~yGe~xC~y/Si heterostructures by pulsed-laser-induced epitaxy of C^+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100) [2403-35]

Contributors:

Boulmer, J. (author) / Desmur-Larre, A. (author) / Guedj, C. (author) / Debarre, D. (author) / Dobowski, J. J. / SPIE

Conference:

Conference, Laser-induced thin film processing ; 1995 ; San Jose; CA

Published in:

Laser-induced thin film processing ; 362-373

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

Publication date:

1995-01-01

Size:

12 pages

ISBN:

0819417505

ISSN:

0361-0748

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

laser induced thin film processing , SPIE

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