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    Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method [2403-29]

    New search for: Khudobenko, A. I.
    New search for: Panchenko, V. Y.
    New search for: Seminogov, V. N.
    New search for: Dobowski, J. J.
    New search for: SPIE

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    Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method [2403-29]

    New search for: Khudobenko, A. I.
    New search for: Panchenko, V. Y.
    New search for: Seminogov, V. N.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method [2403-29]

    New search for: Khudobenko, A. I.
    New search for: Panchenko, V. Y.
    New search for: Seminogov, V. N.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method [2403-29]

    Contributors:

    Khudobenko, A. I. (author) / Panchenko, V. Y. (author) / Seminogov, V. N. (author) / Dobowski, J. J. / SPIE

    Conference:

    Conference, Laser-induced thin film processing ; 1995 ; San Jose; CA

    Published in:

    Laser-induced thin film processing ; 409-413

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

    Publication date:

    1995-01-01

    Size:

    5 pages

    ISBN:

    0819417505

    ISSN:

    0361-0748

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    laser induced thin film processing , SPIE

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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