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Formation and characterization of Si5C3 type silicon carbide by carbon ion implantation with a MEVVA ion source
Formation and characterization of Si5C3 type silicon carbide by carbon ion implantation with a MEVVA ion source
Formation and characterization of Si5C3 type silicon carbide by carbon ion implantation with a MEVVA ion source
Guo, L. B. (author) / Wang, Y. L. (author) / Song, F. (author) / He, F. (author) / Huang, Y. (author) / Yan, L. H. (author) / Wan, Y. Z. (author)
MATERIALS LETTERS ; 61 ; 4083-4085
2007-01-01
3 pages
Article (Journal)
English
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