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    Characterization of radio-frequency sputtered AIN films by spectroscopic ellipsometry [6647-23]

    New search for: Huang, D.
    New search for: Uppireddi, K.
    New search for: Pantojas, V.M.
    New search for: Otano-Rivera, W.
    New search for: Weiner, B.R.
    New search for: Morell, G.
    New search for: Smith, G.B.
    New search for: Cortie, M.B.

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    Characterization of radio-frequency sputtered AIN films by spectroscopic ellipsometry [6647-23]

    New search for: Huang, D.
    New search for: Uppireddi, K.
    New search for: Pantojas, V.M.
    New search for: Otano-Rivera, W.
    New search for: Weiner, B.R.
    New search for: Morell, G.
    New search for: Smith, G.B.
    New search for: Cortie, M.B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of radio-frequency sputtered AIN films by spectroscopic ellipsometry [6647-23]

    New search for: Huang, D.
    New search for: Uppireddi, K.
    New search for: Pantojas, V.M.
    New search for: Otano-Rivera, W.
    New search for: Weiner, B.R.
    New search for: Morell, G.
    New search for: Smith, G.B.
    New search for: Cortie, M.B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Characterization of radio-frequency sputtered AIN films by spectroscopic ellipsometry [6647-23]

    Contributors:

    Huang, D. (author) / Uppireddi, K. (author) / Pantojas, V.M. (author) / Otano-Rivera, W. (author) / Weiner, B.R. (author) / Morell, G. (author) / Smith, G.B. / Cortie, M.B. / Society of Photo-optical Instrumentation Engineers

    Conference:

    Conference, Nanocoatings (Conference) ; 2007 ; San Diego, CA

    Published in:

    Nanocoatings (Conference) ; 6647 0M

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 6647

    Publication date:

    2007-01-01

    Size:

    6647 0M

    ISBN:

    9780819467959 , 0819467952

    ISSN:

    0277-786X

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    Nanostructured materials , Plasmons (Physics) , Nanoparticles , Nanocoatings , SPIE

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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