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Direct projection patterning of aluminum on the SiO~2 surface by using synchrotron radiation induced growth initiation of thermal chemical vapor deposition
Direct projection patterning of aluminum on the SiO~2 surface by using synchrotron radiation induced growth initiation of thermal chemical vapor deposition
Direct projection patterning of aluminum on the SiO~2 surface by using synchrotron radiation induced growth initiation of thermal chemical vapor deposition
Uesugi, F. (author) / Nishiyama, I. (author)
APPLIED SURFACE SCIENCE ; 62 ; 151
1992-01-01
151 pages
Article (Journal)
Unknown
DDC:
621.35
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