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    Infrared study of structural changes in silicon oxynitride films

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    Infrared study of structural changes in silicon oxynitride films

    New search for: Pivac, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Infrared study of structural changes in silicon oxynitride films

    New search for: Pivac, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Infrared study of structural changes in silicon oxynitride films

    Contributors:

    Pivac, B. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE LETTERS ; 12 ; 23

    Publication date:

    1993-01-01

    Size:

    23 pages

    ISSN:

    0261-8028

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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