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Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M.

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Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M.

Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M.

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Document information

Title:

Deuterium diffusion into plasma-deposited silicon oxynitride films

Contributors:

Arnoldbik, W. M. (author) / Maree, C. H. M. (author) / Habraken, F. H. P. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 74 ; 103

Publication date:

1994-01-01

Size:

103 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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