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Deuterium diffusion into plasma-deposited silicon oxynitride films
Deuterium diffusion into plasma-deposited silicon oxynitride films
Deuterium diffusion into plasma-deposited silicon oxynitride films
Arnoldbik, W. M. (author) / Maree, C. H. M. (author) / Habraken, F. H. P. M. (author)
APPLIED SURFACE SCIENCE ; 74 ; 103
1994-01-01
103 pages
Article (Journal)
Unknown
DDC:
621.35
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