Defect levels in n-silicon after high energy and high dose implantation of proton

Barbot, J. F. / Blanchard, C. / Ntsoenzok, E. et al. | British Library Online Contents | 1996

Low-energy ion implantation for shallow junction crystalline silicon solar cell

Yang, W. L. / Lin, T. Y. / Lien, S. S. et al. | British Library Online Contents | 2016

Characterization of neon implantation damage in silicon

Oliviero, E. / Peripolli, S. / Fichtner, P. F. et al. | British Library Online Contents | 2004

Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

Zolnai, Z. / Khanh, N. Q. / Lohner, T. et al. | British Library Online Contents | 2003

Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation

Szekeres, A. / Alexandrova, S. / Petrik, P. et al. | British Library Online Contents | 2013