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    Effect of deposition temperature on dielectric properties of PECVD Ta~2O~5 thin film

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    Effect of deposition temperature on dielectric properties of PECVD Ta~2O~5 thin film

    New search for: Hwan Seong Moon
    New search for: Jae Suk Lee
    New search for: Sung Wook Han
    New search for: Jong Wan Park

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of deposition temperature on dielectric properties of PECVD Ta~2O~5 thin film

    New search for: Hwan Seong Moon
    New search for: Jae Suk Lee
    New search for: Sung Wook Han
    New search for: Jong Wan Park

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of deposition temperature on dielectric properties of PECVD Ta~2O~5 thin film

    Contributors:

    Hwan Seong Moon (author) / Jae Suk Lee (author) / Sung Wook Han (author) / Jong Wan Park (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 29 ; 3372

    Publication date:

    1994-01-01

    Size:

    3372 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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