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Materials Issues in Copper Interconnections

Harper, J. M. E. / Colgan, E. G. / Hu, C.-K. / Hummel, J. P.

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Materials Issues in Copper Interconnections

Harper, J. M. E. / Colgan, E. G. / Hu, C.-K. / Hummel, J. P.

Materials Issues in Copper Interconnections

Harper, J. M. E. / Colgan, E. G. / Hu, C.-K. / Hummel, J. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Materials Issues in Copper Interconnections

Contributors:

Harper, J. M. E. (author) / Colgan, E. G. (author) / Hu, C.-K. (author) / Hummel, J. P. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 19 ; 23

Publication date:

1994-01-01

Size:

23 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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