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    Chemical Vapor Deposition of Copper for Advanced On-Chip Interconnects

    New search for: Gelatos, A. V.
    New search for: Jain, A.
    New search for: Marsh, R.
    New search for: Mogab, C. J.

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    Chemical Vapor Deposition of Copper for Advanced On-Chip Interconnects

    New search for: Gelatos, A. V.
    New search for: Jain, A.
    New search for: Marsh, R.
    New search for: Mogab, C. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical Vapor Deposition of Copper for Advanced On-Chip Interconnects

    New search for: Gelatos, A. V.
    New search for: Jain, A.
    New search for: Marsh, R.
    New search for: Mogab, C. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical Vapor Deposition of Copper for Advanced On-Chip Interconnects

    Contributors:

    Gelatos, A. V. (author) / Jain, A. (author) / Marsh, R. (author) / Mogab, C. J. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 19 ; 49

    Publication date:

    1994-01-01

    Size:

    49 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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