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Growth, structure and stress of sputtered TiB~2 thin films

Chen, J. / Barnard, J. A.

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Growth, structure and stress of sputtered TiB~2 thin films

Chen, J. / Barnard, J. A.

Growth, structure and stress of sputtered TiB~2 thin films

Chen, J. / Barnard, J. A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth, structure and stress of sputtered TiB~2 thin films

Contributors:

Chen, J. (author) / Barnard, J. A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 191 ; 233

Publication date:

1995-01-01

Size:

233 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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