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    Improvement of silicon oxide film properties by ultraviolet excimer lamp annealing

    New search for: Parada, E. G.
    New search for: Gonzalez, P.
    New search for: Serra, J.
    New search for: Leon, B.
    New search for: Dieleman, J.
    New search for: Biermann, U. K. P.
    New search for: Hess, P.

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    Improvement of silicon oxide film properties by ultraviolet excimer lamp annealing

    New search for: Parada, E. G.
    New search for: Gonzalez, P.
    New search for: Serra, J.
    New search for: Leon, B.
    New search for: Dieleman, J.
    New search for: Biermann, U. K. P.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Improvement of silicon oxide film properties by ultraviolet excimer lamp annealing

    New search for: Parada, E. G.
    New search for: Gonzalez, P.
    New search for: Serra, J.
    New search for: Leon, B.
    New search for: Dieleman, J.
    New search for: Biermann, U. K. P.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Improvement of silicon oxide film properties by ultraviolet excimer lamp annealing

    Contributors:

    Parada, E. G. (author) / Gonzalez, P. (author) / Serra, J. (author) / Leon, B. (author) / Dieleman, J. / Biermann, U. K. P. / Hess, P.

    Published in:

    Photon-Assisted Processing of Surfaces and Thin Films ; 294

    APPLIED SURFACE SCIENCE ; 86

    Publication date:

    1995-01-01

    Size:

    294 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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