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Plasma-enhanced reactively evaporated deposition of SiO~2 films

Shklyaev, A. A. / Medvedev, A. S.

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Plasma-enhanced reactively evaporated deposition of SiO~2 films

Shklyaev, A. A. / Medvedev, A. S.

Plasma-enhanced reactively evaporated deposition of SiO~2 films

Shklyaev, A. A. / Medvedev, A. S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Plasma-enhanced reactively evaporated deposition of SiO~2 films

Contributors:

Shklyaev, A. A. (author) / Medvedev, A. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 89 ; 49

Publication date:

1995-01-01

Size:

49 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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