Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Spectroscopic investigation of the physicochemical origin of the spontaneous delamination of the sputtered amorphous carbon nitride films

    New search for: Peponas, S.
    New search for: Guedda, M.
    New search for: Benlahsen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Spectroscopic investigation of the physicochemical origin of the spontaneous delamination of the sputtered amorphous carbon nitride films

    New search for: Peponas, S.
    New search for: Guedda, M.
    New search for: Benlahsen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Spectroscopic investigation of the physicochemical origin of the spontaneous delamination of the sputtered amorphous carbon nitride films

    New search for: Peponas, S.
    New search for: Guedda, M.
    New search for: Benlahsen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Spectroscopic investigation of the physicochemical origin of the spontaneous delamination of the sputtered amorphous carbon nitride films

    Contributors:

    Peponas, S. (author) / Guedda, M. (author) / Benlahsen, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 8706-8709

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Sputtered amorphous carbon nitride films

    Kreider, K. G. / Tarlov, M. J. / Gillen, G. J. et al. | British Library Online Contents | 1995

    Deposition mechanism of sputtered amorphous carbon nitride thin film

    Durand-Drouhin, O. / Benlahsen, M. / Clin, M. et al. | British Library Online Contents | 2004

    Formation of porosity in sputtered amorphous hydrogenated carbon films

    Yin, Y. / Collins, R. E. / Zhang, Q.-C. | British Library Online Contents | 1994

    Semiconducting Amorphous Camphoric Carbon Nitride Thin Films

    Rusop, M. / Soga, T. / Jimbo, T. et al. | British Library Online Contents | 2005

    Analysis of Cracking and Delamination of Sputtered Thin Films during Wear Process

    Nakasa, K. / Setyanto, T. A. / Zhang, B. et al. | British Library Online Contents | 2005

    Back to top