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    Generation of Oxidation Induced Stacking Faults in Cz Silicon Wafers

    New search for: Sueoka, K.
    New search for: Akatsuka, M.
    New search for: Nishihara, K.
    New search for: Yamamoto, T.
    New search for: Kobayashi, S.

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    Generation of Oxidation Induced Stacking Faults in Cz Silicon Wafers

    New search for: Sueoka, K.
    New search for: Akatsuka, M.
    New search for: Nishihara, K.
    New search for: Yamamoto, T.
    New search for: Kobayashi, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Generation of Oxidation Induced Stacking Faults in Cz Silicon Wafers

    New search for: Sueoka, K.
    New search for: Akatsuka, M.
    New search for: Nishihara, K.
    New search for: Yamamoto, T.
    New search for: Kobayashi, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Generation of Oxidation Induced Stacking Faults in Cz Silicon Wafers

    Contributors:

    Sueoka, K. (author) / Akatsuka, M. (author) / Nishihara, K. (author) / Yamamoto, T. (author) / Kobayashi, S. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 1737-1742

    Publication date:

    1995-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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