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Relaxation-Induced Deep Levels in SiGe/Si Heteroepitaxial Films

Mera, Y. / Maeda, K. / Shiraki, Y.

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Relaxation-Induced Deep Levels in SiGe/Si Heteroepitaxial Films

Mera, Y. / Maeda, K. / Shiraki, Y.

Relaxation-Induced Deep Levels in SiGe/Si Heteroepitaxial Films

Mera, Y. / Maeda, K. / Shiraki, Y.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Relaxation-Induced Deep Levels in SiGe/Si Heteroepitaxial Films

Contributors:

Mera, Y. (author) / Maeda, K. (author) / Shiraki, Y. (author)

Published in:

MATERIALS SCIENCE FORUM ; 365-370

Publication date:

1995-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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