Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique: Fid-Bau Portal

Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique

Morris, S. J. / Fougeres, P. / Bozzo-Escoubas, S. / Bodnar, S. / Gaillard, S.

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Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique

Morris, S. J. / Fougeres, P. / Bozzo-Escoubas, S. / Bodnar, S. / Gaillard, S.

Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique

Morris, S. J. / Fougeres, P. / Bozzo-Escoubas, S. / Bodnar, S. / Gaillard, S.

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Document information

Title:

Simultaneous optical measurement of Germanium content and Boron doping in strained heteroepitaxial SiGe films using a novel data-analysis technique

Contributors:

Morris, S. J. (author) / Fougeres, P. (author) / Bozzo-Escoubas, S. (author) / Bodnar, S. (author) / Gaillard, S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 383-387

Publication date:

2004-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Morris, S. / Fougeres, P. / Bozzo-Escoubas, S. et al. | British Library Online Contents | 2005

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Mera, Y. / Maeda, K. / Shiraki, Y. | British Library Online Contents | 1995

Boron diffusion in strained and strain-relaxed SiGe

Wang, C. C. / Sheu, Y. M. / Liu, S. et al. | British Library Online Contents | 2005

Strained semiconductors structures: simulation of the thin films heteroepitaxial growth

Sahlaoui, M. / Rouhani, M.D. / Esteve, D. et al. | British Library Online Contents | 1999