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    Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

    New search for: Kirscht, F. G.
    New search for: Furukawa, Y.
    New search for: Seifert, W.
    New search for: Schmalz, K.
    New search for: Buczkowski, A.
    New search for: Kim, S. B.
    New search for: Abe, H.
    New search for: Koya, H.
    New search for: Bailey, J.

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    Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

    New search for: Kirscht, F. G.
    New search for: Furukawa, Y.
    New search for: Seifert, W.
    New search for: Schmalz, K.
    New search for: Buczkowski, A.
    New search for: Kim, S. B.
    New search for: Abe, H.
    New search for: Koya, H.
    New search for: Bailey, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

    New search for: Kirscht, F. G.
    New search for: Furukawa, Y.
    New search for: Seifert, W.
    New search for: Schmalz, K.
    New search for: Buczkowski, A.
    New search for: Kim, S. B.
    New search for: Abe, H.
    New search for: Koya, H.
    New search for: Bailey, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

    Contributors:

    Kirscht, F. G. (author) / Furukawa, Y. (author) / Seifert, W. (author) / Schmalz, K. (author) / Buczkowski, A. (author) / Kim, S. B. (author) / Abe, H. (author) / Koya, H. (author) / Bailey, J. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 230-236

    Publication date:

    1996-01-01

    Size:

    7 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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