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    Rapid thermal post-metallization annealing effect on thin gate oxides

    New search for: Jeng, M.-J.
    New search for: Lin, H.-S.
    New search for: Hwu, J.-G.

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    Rapid thermal post-metallization annealing effect on thin gate oxides

    New search for: Jeng, M.-J.
    New search for: Lin, H.-S.
    New search for: Hwu, J.-G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Rapid thermal post-metallization annealing effect on thin gate oxides

    New search for: Jeng, M.-J.
    New search for: Lin, H.-S.
    New search for: Hwu, J.-G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Rapid thermal post-metallization annealing effect on thin gate oxides

    Contributors:

    Jeng, M.-J. (author) / Lin, H.-S. (author) / Hwu, J.-G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 92 ; 208-211

    Publication date:

    1996-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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