Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor: Fid-Bau Portal

Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor

Garibin, E. A. / Mironov, I. A. / Khoruzhnikov, S. E. / Vorob'ev, A. N.

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Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor

Garibin, E. A. / Mironov, I. A. / Khoruzhnikov, S. E. / Vorob'ev, A. N.

Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor

Garibin, E. A. / Mironov, I. A. / Khoruzhnikov, S. E. / Vorob'ev, A. N.

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Title:

Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor

Contributors:

Garibin, E. A. (author) / Mironov, I. A. (author) / Khoruzhnikov, S. E. (author) / Vorob'ev, A. N. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 39 ; 8-14

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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