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Alternatively matched r.f.-PECVD system for diamond synthesis

Choi, Y. / Lee, H. W. / Song, J. S. / Song, Y. S.

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Alternatively matched r.f.-PECVD system for diamond synthesis

Choi, Y. / Lee, H. W. / Song, J. S. / Song, Y. S.

Alternatively matched r.f.-PECVD system for diamond synthesis

Choi, Y. / Lee, H. W. / Song, J. S. / Song, Y. S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Alternatively matched r.f.-PECVD system for diamond synthesis

Contributors:

Choi, Y. (author) / Lee, H. W. (author) / Song, J. S. (author) / Song, Y. S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 39 ; L10-L13

Publication date:

1996-01-01

Size:

L10-L13

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Britton, D. T. / Hempel, A. / Hempel, M. et al. | British Library Online Contents | 2001

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The structural evolution of nanocrystalline diamond films synthesized by r.f. PECVD

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