Excimer laser etching of GaAs, Al~xGa~1~-~xAs and CuInSe~2 in chlorine atmosphere: Fid-Bau Portal

Excimer laser etching of GaAs, Al~xGa~1~-~xAs and CuInSe~2 in chlorine atmosphere

Zimmer, K. / Dienelt, J. / Herfurth, F. / Braun, A. / Otte, K. / Lippold, G. / Gottschalch, V. / Bigl, F.

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Excimer laser etching of GaAs, Al~xGa~1~-~xAs and CuInSe~2 in chlorine atmosphere

Zimmer, K. / Dienelt, J. / Herfurth, F. / Braun, A. / Otte, K. / Lippold, G. / Gottschalch, V. / Bigl, F.

Excimer laser etching of GaAs, Al~xGa~1~-~xAs and CuInSe~2 in chlorine atmosphere

Zimmer, K. / Dienelt, J. / Herfurth, F. / Braun, A. / Otte, K. / Lippold, G. / Gottschalch, V. / Bigl, F.

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Title:

Excimer laser etching of GaAs, Al~xGa~1~-~xAs and CuInSe~2 in chlorine atmosphere

Contributors:

Zimmer, K. (author) / Dienelt, J. (author) / Herfurth, F. (author) / Braun, A. (author) / Otte, K. (author) / Lippold, G. (author) / Gottschalch, V. (author) / Bigl, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 127-129 ; 800-804

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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