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Experimental Investigations of Silicon Wafer Grinding

Liu, J. H. / Pei, Z. J. / Fisher, G. R.

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Experimental Investigations of Silicon Wafer Grinding

Liu, J. H. / Pei, Z. J. / Fisher, G. R.

Experimental Investigations of Silicon Wafer Grinding

Liu, J. H. / Pei, Z. J. / Fisher, G. R.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Experimental Investigations of Silicon Wafer Grinding

Contributors:

Liu, J. H. (author) / Pei, Z. J. (author) / Fisher, G. R. (author) / Guo, D. / Kuriyagawa, T. / Wang, J. / Tamaki, J.

Published in:

Advances in Abrasive Technology IX ; 361-366

KEY ENGINEERING MATERIALS ; 329

Publication date:

2007-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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