Synchrotron-radiation-excited etching of SiC

Ogura, M. / Terakado, S. / Suzuki, S. et al. | British Library Online Contents | 1994

Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Katoh, T. / Yamaguchi, D. / Satoh, Y. et al. | British Library Online Contents | 2002

Mechanisms of synchrotron radiation-excited etching reactions of semiconductor materials

Ohashi, H. / Yoshida, A. / Tabayashi, K. et al. | British Library Online Contents | 1993

Anisotropic etching of silicon nitride at low temperatures by synchrotron radiation

Kitamura, O. / Goto, T. / Terakado, S. et al. | British Library Online Contents | 1994

Synchrotron radiation stimulated etching SiO2 thin films with a contact cobalt mask

Wang, C. / Urisu, T. | British Library Online Contents | 2005