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Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry
Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry
Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry
Shirai, H. (author) / Arai, T. (author) / Nakamura, T. (author)
APPLIED SURFACE SCIENCE ; 113/114 ; 111-115
1997-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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