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Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry
Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry
Control of the initial stage of nanocrystallite silicon growth monitored by in-situ spectroscopic ellipsometry
Shirai, H. (Autor:in) / Arai, T. (Autor:in) / Nakamura, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 113/114 ; 111-115
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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