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Application of the ferroelectric materials to ULSI memories

Tarui, Y. / Hirai, T. / Teramoto, K. / Koike, H. / Nagashima, K.

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Application of the ferroelectric materials to ULSI memories

Tarui, Y. / Hirai, T. / Teramoto, K. / Koike, H. / Nagashima, K.

Application of the ferroelectric materials to ULSI memories

Tarui, Y. / Hirai, T. / Teramoto, K. / Koike, H. / Nagashima, K.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Application of the ferroelectric materials to ULSI memories

Contributors:

Tarui, Y. (author) / Hirai, T. (author) / Teramoto, K. (author) / Koike, H. (author) / Nagashima, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 656-663

Publication date:

1997-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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