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Structure and optical properties of boron nitride thin films prepared by PECVD

Abdellaoui, A. / Bath, A. / Bouchikhi, B. / Baehr, O.

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Structure and optical properties of boron nitride thin films prepared by PECVD

Abdellaoui, A. / Bath, A. / Bouchikhi, B. / Baehr, O.

Structure and optical properties of boron nitride thin films prepared by PECVD

Abdellaoui, A. / Bath, A. / Bouchikhi, B. / Baehr, O.

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Document information

Title:

Structure and optical properties of boron nitride thin films prepared by PECVD

Contributors:

Abdellaoui, A. (author) / Bath, A. (author) / Bouchikhi, B. (author) / Baehr, O. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 47 ; 257-262

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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