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Fabrication of high aspect ratio silicon micro-tips for field emission devices

In Jae Chung / Murfett, D. B. / Hariz, A. / Haskard, M. R.

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Fabrication of high aspect ratio silicon micro-tips for field emission devices

In Jae Chung / Murfett, D. B. / Hariz, A. / Haskard, M. R.

Fabrication of high aspect ratio silicon micro-tips for field emission devices

In Jae Chung / Murfett, D. B. / Hariz, A. / Haskard, M. R.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of high aspect ratio silicon micro-tips for field emission devices

Contributors:

In Jae Chung (author) / Murfett, D. B. (author) / Hariz, A. (author) / Haskard, M. R. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 32 ; 4999-5003

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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