A platform for research: civil engineering, architecture and urbanism
Micro-etching technology of high aspect ratio frameworks for electronic devices
Micro-etching technology of high aspect ratio frameworks for electronic devices
Micro-etching technology of high aspect ratio frameworks for electronic devices
Cho, Y.-R. (author) / Oh, J.-Y. (author) / Kim, H.-S. (author) / Jeong, H.-S. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 64 ; 79 - 83
1999-01-01
5 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Research of Micro-Inertial Device High-Aspect-Ratio Etching Parameters
British Library Online Contents | 2014
|Fabrication of high aspect ratio silicon micro-tips for field emission devices
British Library Online Contents | 1997
|British Library Online Contents | 2010
|High aspect ratio anisotropic silicon etching for x-ray phase contrast imaging grating fabrication
British Library Online Contents | 2019
|High aspect ratio micro mechanical structures made of bulk metallic glass
British Library Online Contents | 2004
|