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A simple method for fabrication of high-aspect-ratio all-silicon grooves

Ma, Y. / Pan, A. / Si, J. / Chen, T. / Chen, F. / Hou, X.

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A simple method for fabrication of high-aspect-ratio all-silicon grooves

Ma, Y. / Pan, A. / Si, J. / Chen, T. / Chen, F. / Hou, X.

A simple method for fabrication of high-aspect-ratio all-silicon grooves

Ma, Y. / Pan, A. / Si, J. / Chen, T. / Chen, F. / Hou, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A simple method for fabrication of high-aspect-ratio all-silicon grooves

Contributors:

Ma, Y. (author) / Pan, A. (author) / Si, J. (author) / Chen, T. (author) / Chen, F. (author) / Hou, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 284 ; 372-378

Publication date:

2013-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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