Effect of thermal annealing on the microstructure of ytterbium-implanted silicon wafers: Fid-Bau Portal

Effect of thermal annealing on the microstructure of ytterbium-implanted silicon wafers

Yang, Y. / Chen, H. / Zhou, Y. Q. / Li, F. H.

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Effect of thermal annealing on the microstructure of ytterbium-implanted silicon wafers

Yang, Y. / Chen, H. / Zhou, Y. Q. / Li, F. H.

Effect of thermal annealing on the microstructure of ytterbium-implanted silicon wafers

Yang, Y. / Chen, H. / Zhou, Y. Q. / Li, F. H.

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Order at Subito €

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Document information

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Document information

Title:

Effect of thermal annealing on the microstructure of ytterbium-implanted silicon wafers

Contributors:

Yang, Y. (author) / Chen, H. (author) / Zhou, Y. Q. (author) / Li, F. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 32 ; 6665-6670

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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