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Direct determination of the initial thermal evolution behaviour of the platelet defects in hydrogen implanted silicon wafers

Xiao, Q. / Tu, H.

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Direct determination of the initial thermal evolution behaviour of the platelet defects in hydrogen implanted silicon wafers

Xiao, Q. / Tu, H.

Direct determination of the initial thermal evolution behaviour of the platelet defects in hydrogen implanted silicon wafers

Xiao, Q. / Tu, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Similar titles

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Document information

Title:

Direct determination of the initial thermal evolution behaviour of the platelet defects in hydrogen implanted silicon wafers

Contributors:

Xiao, Q. (author) / Tu, H. (author)

Published in:

MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 21 ; 739-742

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0267-0836

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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