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Etching of platinum thin films in an inductively coupled plasma
Etching of platinum thin films in an inductively coupled plasma
Etching of platinum thin films in an inductively coupled plasma
Wuu, D. S. (author) / Kuo, N. H. (author) / Liao, F. C. (author) / Horng, R. H. (author) / Lee, M. K. (author)
APPLIED SURFACE SCIENCE ; 169-170 ; 638-643
2001-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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