Gas and heat treatment effects on the defect structure of a-SiC:H films: Fid-Bau Portal

Gas and heat treatment effects on the defect structure of a-SiC:H films

Friessnegg, T. / Boudreau, M. / Mascher, P. / Simpson, P. J. / Puff, W.

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Gas and heat treatment effects on the defect structure of a-SiC:H films

Friessnegg, T. / Boudreau, M. / Mascher, P. / Simpson, P. J. / Puff, W.

Gas and heat treatment effects on the defect structure of a-SiC:H films

Friessnegg, T. / Boudreau, M. / Mascher, P. / Simpson, P. J. / Puff, W.

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Check availability in my library

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Document information

Title:

Gas and heat treatment effects on the defect structure of a-SiC:H films

Contributors:

Friessnegg, T. (author) / Boudreau, M. (author) / Mascher, P. (author) / Simpson, P. J. (author) / Puff, W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 258/263 ; 709-714

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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