Doping and microwave power effects on the properties of a-SiC:H and c-SiC:H films prepared using ECR-CVD

Yoon, S. F. / Ji, R. / Ahn, J. | British Library Online Contents | 1996

Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. et al. | British Library Online Contents | 2001

The Study of High Temperature Annealing of a-SiC:H Films

Zhang, S. / Hu, Z. / Raniero, L. et al. | British Library Online Contents | 2006

Some effects of phosphorus doping in SiC:H films prepared using ECR-CVD

Ji, R. / Yoon, S. F. / Ahn, J. et al. | British Library Online Contents | 1997

Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Vasin, A. V. / Rusavsky, A. V. / Nazarov, A. N. et al. | British Library Online Contents | 2012