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Raman scattering analysis of defects in 6H-SiC induced by ion implantation
Raman scattering analysis of defects in 6H-SiC induced by ion implantation
Raman scattering analysis of defects in 6H-SiC induced by ion implantation
Perez-Rodriguez, A. (author) / Gonzalez-Varona, O. (author) / Calvo-Barrio, L. (author) / Morante, J. R. (author) / Wirth, H. (author) / Panknin, D. (author) / Skorupa, W. (author)
MATERIALS SCIENCE FORUM ; 258/263 ; 727-732
1997-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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