X-ray emission spectroscopic studies of silicon precipitation in surface layer of SiO~2 induced by argon excimer laser irradiation: Fid-Bau Portal

X-ray emission spectroscopic studies of silicon precipitation in surface layer of SiO~2 induced by argon excimer laser irradiation

Kurosawa, K. / Herman, P. R. / Kurmaev, E. Z. / Shamin, S. N. / Galakhov, V. R. / Takigawa, Y. / Yokotani, A. / Kameyama, A. / Sasaki, W.

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X-ray emission spectroscopic studies of silicon precipitation in surface layer of SiO~2 induced by argon excimer laser irradiation

Kurosawa, K. / Herman, P. R. / Kurmaev, E. Z. / Shamin, S. N. / Galakhov, V. R. / Takigawa, Y. / Yokotani, A. / Kameyama, A. / Sasaki, W.

X-ray emission spectroscopic studies of silicon precipitation in surface layer of SiO~2 induced by argon excimer laser irradiation

Kurosawa, K. / Herman, P. R. / Kurmaev, E. Z. / Shamin, S. N. / Galakhov, V. R. / Takigawa, Y. / Yokotani, A. / Kameyama, A. / Sasaki, W.

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Document information

Title:

X-ray emission spectroscopic studies of silicon precipitation in surface layer of SiO~2 induced by argon excimer laser irradiation

Contributors:

Kurosawa, K. (author) / Herman, P. R. (author) / Kurmaev, E. Z. (author) / Shamin, S. N. (author) / Galakhov, V. R. (author) / Takigawa, Y. (author) / Yokotani, A. (author) / Kameyama, A. (author) / Sasaki, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 126 ; 83-91

Publication date:

1998-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Shinozaki, T. / Ooie, T. / Yano, T. et al. | British Library Online Contents | 2002

Polycrystalline silicon precipitates on SiO~2 using an argon excimer laser

Ohmukai, M. / Takigawa, Y. / Kurosawa, K. | British Library Online Contents | 1999

Excimer laser irradiation induced formation of diamond-like carbon layer on graphite

Mechler, A. / Heszler, P. / Kantor, Z. et al. | British Library Online Contents | 1999

Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres

Pedraza, A. J. / Fowlkes, J. D. / Jesse, S. et al. | British Library Online Contents | 2000

Windowless argon excimer source for surface modification

Elsner, C. / Lenk, M. / Prager, L. et al. | British Library Online Contents | 2006