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Mechanical deformation of PZT thin films for MEMS applications

Bahr, D. F. / Robach, J. S. / Wright, J. S. / Francis, L. F. / Gerberich, W. W.

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Mechanical deformation of PZT thin films for MEMS applications

Bahr, D. F. / Robach, J. S. / Wright, J. S. / Francis, L. F. / Gerberich, W. W.

Mechanical deformation of PZT thin films for MEMS applications

Bahr, D. F. / Robach, J. S. / Wright, J. S. / Francis, L. F. / Gerberich, W. W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical deformation of PZT thin films for MEMS applications

Contributors:

Bahr, D. F. (author) / Robach, J. S. (author) / Wright, J. S. (author) / Francis, L. F. (author) / Gerberich, W. W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 259 ; 126-131

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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