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    Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

    New search for: Kim, S. K.
    New search for: Kim, C. S.
    New search for: Lee, K. W.
    New search for: Lee, S. Y.

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    Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

    New search for: Kim, S. K.
    New search for: Kim, C. S.
    New search for: Lee, K. W.
    New search for: Lee, S. Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

    New search for: Kim, S. K.
    New search for: Kim, C. S.
    New search for: Lee, K. W.
    New search for: Lee, S. Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

    Contributors:

    Kim, S. K. (author) / Kim, C. S. (author) / Lee, K. W. (author) / Lee, S. Y. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 115-121

    Publication date:

    2002-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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