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    Film thickness effects on the fracture of tantalum nitride on aluminum nitride thin film systems

    New search for: Moody, N. R.
    New search for: Medlin, D.
    New search for: Boehme, D.
    New search for: Norwood, D. P.
    New search for: Gerberich, W. W.

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    Film thickness effects on the fracture of tantalum nitride on aluminum nitride thin film systems

    New search for: Moody, N. R.
    New search for: Medlin, D.
    New search for: Boehme, D.
    New search for: Norwood, D. P.
    New search for: Gerberich, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Film thickness effects on the fracture of tantalum nitride on aluminum nitride thin film systems

    New search for: Moody, N. R.
    New search for: Medlin, D.
    New search for: Boehme, D.
    New search for: Norwood, D. P.
    New search for: Gerberich, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Film thickness effects on the fracture of tantalum nitride on aluminum nitride thin film systems

    Contributors:

    Moody, N. R. (author) / Medlin, D. (author) / Boehme, D. (author) / Norwood, D. P. (author) / Gerberich, W. W.

    Published in:

    Nanomechanics and Nanofracture ; 107-118

    ENGINEERING FRACTURE MECHANICS ; 61

    Publication date:

    1998-01-01

    Size:

    12 pages

    ISSN:

    0013-7944

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 126

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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