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    Substrate composition effects on the interfacial fracture of tantalum nitride films

    New search for: Moody, N. R.
    New search for: Strojny, A.
    New search for: Medlin, D. L.
    New search for: Talin, A.
    New search for: Gerberich, W. W.

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    Substrate composition effects on the interfacial fracture of tantalum nitride films

    New search for: Moody, N. R.
    New search for: Strojny, A.
    New search for: Medlin, D. L.
    New search for: Talin, A.
    New search for: Gerberich, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Substrate composition effects on the interfacial fracture of tantalum nitride films

    New search for: Moody, N. R.
    New search for: Strojny, A.
    New search for: Medlin, D. L.
    New search for: Talin, A.
    New search for: Gerberich, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Substrate composition effects on the interfacial fracture of tantalum nitride films

    Contributors:

    Moody, N. R. (author) / Strojny, A. (author) / Medlin, D. L. (author) / Talin, A. (author) / Gerberich, W. W. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 2306-2313

    Publication date:

    1999-01-01

    Size:

    8 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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