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    ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, PIEZOELECTRIC COMPONENT, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM

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    New search for: AKIYAMA MORITO
    New search for: NAGASE TOSHIMI
    New search for: NISHIKUBO KEIKO
    New search for: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

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    ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, PIEZOELECTRIC COMPONENT, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM

    New search for: UMEDA KEIICHI
    New search for: AKIYAMA MORITO
    New search for: NAGASE TOSHIMI
    New search for: NISHIKUBO KEIKO
    New search for: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

    Access

    Download

    ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, PIEZOELECTRIC COMPONENT, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM

    New search for: UMEDA KEIICHI
    New search for: AKIYAMA MORITO
    New search for: NAGASE TOSHIMI
    New search for: NISHIKUBO KEIKO
    New search for: HONDA ATSUSHI

    A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, PIEZOELECTRIC COMPONENT, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM

    Contributors:

    UMEDA KEIICHI (author) / AKIYAMA MORITO (author) / NAGASE TOSHIMI (author) / NISHIKUBO KEIKO (author) / HONDA ATSUSHI (author)

    Publication date:

    2016-12-22

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / G10K Tonerzeugungsvorrichtungen , SOUND-PRODUCING DEVICES

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