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Formation of TiSi"2 thin films on stressed (001)Si substrates

Cheng, S.L. / Huang, H.Y. / Peng, Y.C. / Chen, L.J. / Tsui, B.Y. / Tsai, C.J. / Guo, S.S. / Yang, Y.R. / Lin, J.T.

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Formation of TiSi"2 thin films on stressed (001)Si substrates

Cheng, S.L. / Huang, H.Y. / Peng, Y.C. / Chen, L.J. / Tsui, B.Y. / Tsai, C.J. / Guo, S.S. / Yang, Y.R. / Lin, J.T.

Formation of TiSi"2 thin films on stressed (001)Si substrates

Cheng, S.L. / Huang, H.Y. / Peng, Y.C. / Chen, L.J. / Tsui, B.Y. / Tsai, C.J. / Guo, S.S. / Yang, Y.R. / Lin, J.T.

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Document information

Title:

Formation of TiSi"2 thin films on stressed (001)Si substrates

Contributors:

Cheng, S.L. (author) / Huang, H.Y. (author) / Peng, Y.C. (author) / Chen, L.J. (author) / Tsui, B.Y. (author) / Tsai, C.J. (author) / Guo, S.S. (author) / Yang, Y.R. (author) / Lin, J.T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 142 ; 295-299

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Getto, R. / Freytag, J. / Kopnarski, M. et al. | British Library Online Contents | 1998

Atomic force microscope investigation of the thermal stability of thin TiSi~2 films

Amorsolo, A. V. / Funkenbusch, P. D. / Kadin, A. M. | British Library Online Contents | 1998

Modeling of the surface roughness of thin TiSi~2 films at the point of rupture

Amorsolo, A. V. / Funkenbusch, P. D. / Kadin, A. M. | British Library Online Contents | 1999

Formation of TiSi~2 on nitrogen ion implanted (001)Si

Cheng, S. L. / Chen, L. J. / Tsui, B. Y. | British Library Online Contents | 1999

Structure, Morphology, and Kinetics of the C49 to C54 Phase Transformation in TiSi~2 Thin Films

Bocelli, S. / Marabelli, F. / Iannuzzi, M. et al. | British Library Conference Proceedings | 1998