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    3C-SiC Films on Si for MEMS Applications: Mechanical Properties

    New search for: Locke, C.
    New search for: Kravchenko, G.
    New search for: Waters, P.
    New search for: Reddy, J.D.
    New search for: Du, K.
    New search for: Volinsky, A.A.
    New search for: Frewin, C.L.
    New search for: Saddow, S.E.

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    3C-SiC Films on Si for MEMS Applications: Mechanical Properties

    New search for: Locke, C.
    New search for: Kravchenko, G.
    New search for: Waters, P.
    New search for: Reddy, J.D.
    New search for: Du, K.
    New search for: Volinsky, A.A.
    New search for: Frewin, C.L.
    New search for: Saddow, S.E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    3C-SiC Films on Si for MEMS Applications: Mechanical Properties

    New search for: Locke, C.
    New search for: Kravchenko, G.
    New search for: Waters, P.
    New search for: Reddy, J.D.
    New search for: Du, K.
    New search for: Volinsky, A.A.
    New search for: Frewin, C.L.
    New search for: Saddow, S.E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    3C-SiC Films on Si for MEMS Applications: Mechanical Properties

    Contributors:

    Locke, C. (author) / Kravchenko, G. (author) / Waters, P. (author) / Reddy, J.D. (author) / Du, K. (author) / Volinsky, A.A. (author) / Frewin, C.L. (author) / Saddow, S.E. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 615/617 ; 633-636

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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