Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon

Simoen, E. / Claeys, C. / Rafi, J. M. et al. | British Library Online Contents | 2006

Characterization of the oxygen distribution in Czochralski silicon using hydrogen-enhanced thermal donor formation

Ulyashin, A. G. / Khorunzhii, I. A. / Job, R. et al. | British Library Online Contents | 2000

Effect of oxygen concentration on diffusion length in Czochralski and magnetic Czochralski silicon

Binetti, S. / Acciarri, M. / Brianza, A. et al. | British Library Online Contents | 1995

Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. et al. | British Library Online Contents | 1999

Nitrogen-doped Czochralski silicon treated in rapid thermal process

Yang, D. / Li, M. / Cui, C. et al. | British Library Online Contents | 2006