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    Boron distribution in silicon after excimer laser annealing with multiple pulses

    New search for: Monakhov, E. V.
    New search for: Svensson, B. G.
    New search for: Linnarsson, M. K.
    New search for: La Magna, A.
    New search for: Italia, M.
    New search for: Privitera, V.
    New search for: Fortunato, G.
    New search for: Cuscuna, M.
    New search for: Mariucci, L.

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    Boron distribution in silicon after excimer laser annealing with multiple pulses

    New search for: Monakhov, E. V.
    New search for: Svensson, B. G.
    New search for: Linnarsson, M. K.
    New search for: La Magna, A.
    New search for: Italia, M.
    New search for: Privitera, V.
    New search for: Fortunato, G.
    New search for: Cuscuna, M.
    New search for: Mariucci, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Boron distribution in silicon after excimer laser annealing with multiple pulses

    New search for: Monakhov, E. V.
    New search for: Svensson, B. G.
    New search for: Linnarsson, M. K.
    New search for: La Magna, A.
    New search for: Italia, M.
    New search for: Privitera, V.
    New search for: Fortunato, G.
    New search for: Cuscuna, M.
    New search for: Mariucci, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Boron distribution in silicon after excimer laser annealing with multiple pulses

    Contributors:

    Monakhov, E. V. (author) / Svensson, B. G. (author) / Linnarsson, M. K. (author) / La Magna, A. (author) / Italia, M. (author) / Privitera, V. (author) / Fortunato, G. (author) / Cuscuna, M. (author) / Mariucci, L. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 228-231

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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