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Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

Bruno, G. / Losurdo, M. / Giangregorio, M. M. / Capezzuto, P. / Brown, A. S. / Kim, T. H. / Choi, S.

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Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

Bruno, G. / Losurdo, M. / Giangregorio, M. M. / Capezzuto, P. / Brown, A. S. / Kim, T. H. / Choi, S.

Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

Bruno, G. / Losurdo, M. / Giangregorio, M. M. / Capezzuto, P. / Brown, A. S. / Kim, T. H. / Choi, S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Real time ellipsometry for monitoring plasma-assisted epitaxial growth of GaN

Contributors:

Bruno, G. (author) / Losurdo, M. (author) / Giangregorio, M. M. (author) / Capezzuto, P. (author) / Brown, A. S. (author) / Kim, T. H. (author) / Choi, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 219-223

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Losurdo, M. / Capezzuto, P. / Bruno, G. | British Library Online Contents | 1999

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Johs, B. / Herzinger, C. / He, P. et al. | British Library Online Contents | 1997

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