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Theoretical study on adsorption mechanisms of gaseous matter from cleanroom air onto silicon wafer surface

Kagi, N. / Fujii, S.

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Theoretical study on adsorption mechanisms of gaseous matter from cleanroom air onto silicon wafer surface

Kagi, N. / Fujii, S.

Theoretical study on adsorption mechanisms of gaseous matter from cleanroom air onto silicon wafer surface

Kagi, N. / Fujii, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Theoretical study on adsorption mechanisms of gaseous matter from cleanroom air onto silicon wafer surface

Contributors:

Kagi, N. (author) / Fujii, S. (author)

Published in:

JOURNAL OF ARCHITECTURE PLANNING AND ENVIRONMENTAL ENGINEERING ; 67-72

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0910-8017

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 720

Kagi, N. / Fujii, S. / Yuasa, K. | British Library Online Contents | 1999

Role of moisture for absorption mechanisms of organic compounds on si wafer surfaces: Gaseous organic compounds in cleanroom air

Kagi, N. / Fujii, S. / Yuasa, K. et al. | British Library Online Contents | 1999

Adsorption of Gaseous Hydrogen onto Metal Surface

Nagumo, M. | British Library Online Contents | 2006

Fire hazards of wafer carriers in cleanroom environment

Wu, P.K.S. / Chaffee, J.L. / Peterkin, H. | Tema Archive | 2003

Adsorption of Gaseous Hydrogen onto a Metal Surface

Nagumo, M. | British Library Online Contents | 2006